Samsung Developing Advanced Smart Sensor System for Semiconductor Process Control and Management

Samsung Electronics is currently in the process of developing an advanced "smart sensor system" designed to effectively control and manage semiconductor processes. Enhancing semiconductor yield requires precise control over plasma uniformity and density during the production process. The forthcoming "intelligent sensor system" will play a crucial role in measuring wafer plasma uniformity and accurately managing key processes such as etching, deposition, and cleaning. By doing so, it is expected to significantly boost semiconductor yield and production capacity.

Historically, Samsung has relied on the purchase of wafer smart sensors from foreign manufacturers, primarily from the United States, incurring substantial costs amounting to tens of millions of won. However, due to the recent surge in demand for increased production, Samsung is now focusing on in-house research to develop its own sensors and reduce dependence on foreign suppliers.

The smart sensors being developed by Samsung Electronics are designed to be ultra-small, ensuring minimal impact on existing equipment space. This aspect is particularly advantageous as it allows for increased production capacity while optimizing space utilization.

Looking ahead, Samsung Electronics plans to gradually expand the development and application of smart sensors. The company aims to surpass plasma-related applications and develop SMART sensors and systems that can be employed in diverse semiconductor processes.